Ion beam sputtering of fluoropolymers

Self-organized ordering of nanostructures produced by ion-beam sputtering.

We study the self-organized ordering of nanostructures produced by ion-beam sputtering of targets amorphizing under irradiation. By introducing a model akin to models of pattern formation in aeolian sand dunes, we extend consistently the current continuum theory of erosion by IBS. We obtain new nonlinear effects responsible for the in-plane ordering of the structures, whose strength correlates ...

Simulating discrete models of pattern formation by ion beam sputtering.

A class of simple, (2+1)-dimensional, discrete models is reviewed, which allow us to study the evolution of surface patterns on solid substrates during ion beam sputtering (IBS). The models are based on the same assumptions about the erosion process as the existing continuum theories. Several distinct physical mechanisms of surface diffusion are added, which allow us to study the interplay of e...

Self-Assembly of Ordered Semiconductor Nanoholes by Ion Beam Sputtering

Low-energy-ion bombardment of semiconductors can lead to the development of complex and diverse nanostructures. Of particular interest in these structured surfaces is the formation of highly ordered patterns whose optical, electronic, andmagnetic properties are different from those of bulk materials and might find technological uses. Compared to the low efficiency of lithographic methods for ma...

Point defects in Sc2O3 thin films by ion beam sputtering.

We show that the concentration of oxygen interstitials trapped in Sc2O3 films by ion beam sputtering from metal targets can be controlled by modifying deposition conditions. We have identified point defects in the form of oxygen interstitials that are present in Sc2O3 films, in significantly high concentrations, i.e., ∼10(18)  cm(-3). These results show a correlation between the increase of oxy...

Nanocrystalline magnetite thin films grown by dual ion-beam sputtering